Contact a Superuser

General
Machine Superuser Email address
Cleanroom Procedure --- ---
HF Hood --- ---

Photolithography
Machine Superuser Email address
Spin Coater --- ---
Hot Plate --- ---
Mask Aligner --- ---

Metal Deposition and Lift-Off
Machine Superuser Email address
Electron Beam Evaporator --- ---
Dirty Ebeam Evaporator --- ---
Dirty Thermal Evaporator --- ---
MRC Sputter --- ---
Cressington Sputter --- ---
Sonicator --- ---

Materials Growth
Machine Superuser Email address
Trion PECVD --- ---

Dry Etching
Machine Superuser Email address
Branson Barrel Asher --- ---
SAMCO RIE Etcher --- ---
Trion RIE-ICP Etcher --- ---
STS Deep RIE --- ---

Device Processing Tools
Machine Superuser Email address
Critical Point Dryer --- ---
Rapid Thermal Annealer --- ---
Tube Furnaces --- ---
Oven --- ---
Wafer Scriber --- ---

Characterization
Machine Superuser Email address
Hanscom AFM --- ---
Walters SPM AFM --- ---
Optical Microscope --- ---
Profilometer --- ---
Probe Station --- ---
Hall Effect --- ---
JEOL SEM --- ---
Hitachi SEM --- ---
Cary Spectrophoto --- ---
Balances --- ---