Contact a Superuser
General
Machine |
Superuser |
Email address |
Cleanroom Procedure |
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HF Hood |
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Photolithography
Machine |
Superuser |
Email address |
Spin Coater |
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Hot Plate |
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Mask Aligner |
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Metal Deposition and Lift-Off
Machine |
Superuser |
Email address |
Electron Beam Evaporator |
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Dirty Ebeam Evaporator |
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Dirty Thermal Evaporator |
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MRC Sputter |
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Cressington Sputter |
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Sonicator |
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Materials Growth
Machine |
Superuser |
Email address |
Trion PECVD |
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Dry Etching
Machine |
Superuser |
Email address |
Branson Barrel Asher |
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SAMCO RIE Etcher |
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Trion RIE-ICP Etcher |
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STS Deep RIE |
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Device Processing Tools
Machine |
Superuser |
Email address |
Critical Point Dryer |
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Rapid Thermal Annealer |
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Tube Furnaces |
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Oven |
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Wafer Scriber |
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Characterization
Machine |
Superuser |
Email address |
Hanscom AFM |
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Walters SPM AFM |
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Optical Microscope |
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Profilometer |
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Probe Station |
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Hall Effect |
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JEOL SEM |
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Hitachi SEM |
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Cary Spectrophoto |
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Balances |
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