Metal Deposition and Lift-Off
Electron Beam Evaporator
"Evan" Electron Beam Evaporator
Evaporant Gold Surcharge: $0.25 per nm
Evaporant Platinum Surcharge: $0.25 per nm
Standard Operating Procedure
Description:
N/A
Features:
4 interchangeable pockets under vacuum
Controllable Purge Port
Sweep Functionality
Ultra High Vacuum Cryopump
Maximum Power: 8kw
"Simiran" Electron Beam Evaporator
"Simiran" Dirty Ebeam Evaporator
Standard Operating Procedure
Description:
Used for optical coatings and materials incompatible with electronic devices.
Features:
4 interchangeable pockets under vacuum
Maximum Power: 3kW
Ultra High Vacuum Turbo Pump
Outside the Cleanroom
"Reid" Thermal Evaporator
"Reid" Thermal Evaporator
Standard Operating Procedure
Description:
Used for physical vapor deposition techniques.
Features:
N/A
MRC Sputter System
MRC Sputter System
Description:
N/A
Features:
DC Mangetron with RF generator
Depositions of metals and some dielectrics
4 interchangeable targets under vacuum
Many 8 inch targets
Cressington Sputter System
Cressington 108
Standard Operating Procedure
Description:
N/A
Features:
Chamber size: 4.75" x 4.75"
Sputter head: Low voltage planar magnetron
Sputter target: Au
Vacuum: Atm - 0.001mb
Current: 0 - 50 mA
Manual gas and current control
Digital timer: 5-300 seconds with pause
Branson Sonicator
Branson B5510
Description:
N/A
Features:
Maximum control of cycle time up to 99 minutes
Maximum control of bath temperatures to 70 °C
Tank: 11.5" x 9.5" x 6"
Frequency: 40 kHz